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luna@powerwaywafer.com
powerwaymaterial@gmail.com
2020-03-17
2020-03-09
Material
X
Thickness (nm)
Dopant
Doping concentration
InP
1000
N (Sulfur)
3.00E+16
In(x)GaAs
0.53
3000
U/D
5.00E+14
500
Substrate
SI (Fe)